Semiconductor O-Rings | Ultra-Pure FFKM Plasma Sealing
SEMICONDUCTOR MANUFACTURING
Ultra-Pure Semiconductor
Sealing Solutions
Mission-critical sealing for plasma chambers, etching equipment, and CVD systems. Our FFKM solutions ensure zero contamination with ultra-pure materials validated by the world’s leading semiconductor manufacturers.
Plasma Chamber Cross-Section
Chamber Wall Seals
FFKM Critical
Gas Feed Lines
Ultra-Pure
Pump Port Seals
High Vacuum
Semiconductor Manufacturing Applications
From front-end processing to back-end packaging, our sealing solutions enable the precision and purity required for advanced semiconductor manufacturing.
Plasma Processing Equipment
Critical sealing for plasma etching chambers, RIE systems, and PECVD equipment where aggressive plasma environments demand ultimate material performance.
Kalrez 6375
Kalrez 7075
Kalrez 4079
CVD & Deposition Systems
Ultra-pure sealing for chemical vapor deposition, atomic layer deposition, and sputtering systems requiring contamination-free processing.
Ultra-Pure FFKM
High-Temp FFKM
Low Outgassing
Lithography & Metrology
Precision sealing for lithography steppers, immersion systems, and metrology equipment where dimensional stability is critical.
DI Water Compatible
Ultra-High Vacuum
Dimensional Stability
Supported Equipment Types
Etching Equipment
Deposition Tools
Thermal Processing
Analytical Equipment
Advanced Materials Technology
Our semiconductor-grade FFKM materials are engineered specifically for the demanding requirements of leading-edge chip manufacturing.
Semiconductor-Grade Material Properties
Validated by Fortune 500 semiconductor manufacturers
| Property | Test Method | Kalrez 6375 | Kalrez 7075 | Kalrez 8575 |
|---|---|---|---|---|
| Extractables (DI Water) | SEMI F57 | < 5 ppb | < 3 ppb | < 1 ppb |
| Particle Generation | IEST-RP-CC001 | Class 10 | Class 1 | Class 1 |
| Plasma Resistance (CF₄) | ASTM F1058 | Excellent | Superior | Ultimate |
| Temperature Range | Continuous Service | -15°F to 600°F | -40°F to 550°F | -65°F to 500°F |
| Metal Content (Al, Na, K) | ICP-MS | < 10 ppb each | < 5 ppb each | < 1 ppb each |
Plasma Gas Compatibility
Contamination Control
Metal Contamination (ppb)
< 1 ppb
< 1 ppb
< 1 ppb
< 2 ppb
Particle Performance
< 10/m³
< 1/m³
Semiconductor ROI Analysis
Quantify the business impact of superior sealing performance in your semiconductor manufacturing operations.
Cost Impact Calculator
Annual Cost Analysis
Current State (Standard FKM)
20 events
480 hours
$7,200,000
$50,000
$7,250,000
With FFKM Upgrade
2 events
48 hours
$720,000
$150,000
$870,000
Annual Savings
$6,380,000
6,380%
5.7 days
Get Your Semiconductor Sealing Quote
Our semiconductor specialists understand your critical requirements. Get a detailed technical proposal with material certifications and contamination analysis within 24 hours.
Technical Requirements
Your Quote Package Includes
Material Certification Package
Complete extractables analysis, contamination reports, and SEMI standard compliance documentation.
24-Hour Technical Response
Priority handling by our semiconductor specialists with detailed material recommendations.
ROI Cost Analysis
Detailed downtime cost analysis showing potential savings from seal reliability improvements.
Free Evaluation Samples
Qualified samples for testing in your equipment with full technical support.
Trusted by Industry Leaders
Plan Your Program
Coordinate supply, QA, and compliance across your global sites.
Plan Your Program